World-Class Semiconductor Company Changes Semiconductor Sealing Material to Save Big & Increase Productivity

by Derek Fay

Manufacturing semiconductors involves volatile processes that use corrosive chemicals and electrically charged gasses (i.e., plasma). These processes can produce corrosive particles that can damage valuable wafers. To protect wafers from particle contamination, semiconductor processing is conducted in clean room environments where O-rings are used in tools to seal multiple chambers.

These chambers are sometimes sealed with fluoroelastomer O-rings, also known as FKM (i.e., Viton®) if the processes involved are not too extreme. FKM is generally limited to temperatures under 200° C and to a shortlist of compatible chemicals. Unfortunately, FKM O-ring seals have to be replaced more often than the more expensive alternative, perfluoroelastomer (FFKM) O-rings.

FFKM materials are impervious to most chemicals and some can withstand temperatures up to 315°C. They provide longer-lasting protection for valuable semiconductor manufacturing and ensure predictable uptime but they are also extraordinarily expensive.

This puts semiconductor manufacturers in a bind: Should they use the less-expensive FKM O-rings but replace them more often, or should they opt for the more costly FFKM O-rings, which last longer (facilitating more continuous production)?

The truth is, it doesn’t have to be an either/or situation. Here’s how H&D developed a custom O-ring solution that had a much lower unit cost than FFKM O-rings but lasted longer than the FKM alternative.

One Company Wonders: Is FFKM Overkill for Semiconductor Seals?

One world-class semiconductor manufacturer had taken the FFKM O-ring route for their semiconductor sealing material.

They reached a point, though, where they wanted to reduce operating costs and thought to ask: “Do we need to use this exorbitant material, or is there a more cost-effective semiconductor sealing material we could use without sacrificing durability and inviting the risk of failure?”

The next step was to turn to H&D Distributors to find out.

Specifically, the semiconductor manufacturer challenged H&D to:

• Deliver O-rings that could be replaced less often as frequent scheduled downtime would incur significant productivity losses and maintenance expenses

• Find lower-cost alternatives, based on the hypothesis that the extremely expensive FFKM O-rings may have been “overspecified”

• Minimize particle counts to protect wafer and chip yield

• Provide superior protection to prevent catastrophic equipment failures due to faulty O-ring degradation 

H&D’s Custom Semiconductor Sealing Solution

Thanks to our global network of O-ring partners, H&D was able to source multiple varieties of “bridge materials,” which are more highly fluorinated than FKMs but can be just as effective as the more expensive FFKMs, but at a lower cost. Following the customer’s specific requirements, the H&D technical team selected O-ring compounds that were more plasma resistant and impervious to particles from etching processes.

After consulting with the semiconductor manufacturer’s equipment and process engineers, H&D went further and analyzed the company’s detailed manufacturing processes to identify the unique chemical compounds each O-ring would be exposed to during production. Chemicals used, plasma recipes, temperatures, substrate materials, adhesion and compression set requirements, as well as other factors affecting seal performance, were evaluated to provide the best seal recommendation.

H&D then supplied test samples to the semiconductor manufacturer’s engineers, who discovered that the recommended highly fluorinated bridge materials increased O-ring life by a factor of two vs. the previous O-rings they had been using. Additionally, thorough testing revealed that the new materials had equal or better performance characteristics with fewer contaminating particles resulting during application.

$360,000 per Year Saved With the Right Semiconductor Sealing Material

Because H&D was able to double the life of the fluoroelastomer seals, the semiconductor manufacturer was able to purchase half as many O-rings — and has doubled its maintenance interval. This has saved them $20,000 per month in materials and service costs.

Additionally, the “bridge material” O-rings exhibited performance characteristics equal to — or even better, in some cases — than the overspecified FFKM O-rings they replaced, resulted in an additional savings of $10,000 per month.

The grand total? $30,000 per month saved — $360,000 per year — all because a semiconductor manufacturer thought to ask the right people, “Are these the best O-rings for my application?”

You might be wondering the same thing. Contact H&D today and find out if similar savings are possible in your case.

About H&D Distributors

For over 40 years, H&D Distributors has provided expert sealing solutions for OEM and MRO customers in various industries where productivity is key, including hydraulics, oil and gas, and semiconductor. Leveraging in-house engineering and testing expertise, exceptional customer service, and a global network of top sealing manufacturers, H&D's goal is to deliver solutions for its customers’ pressing sealing challenges expertly, accurately, and on time.

About Derek Fay As President of H&D Distributors, Derek Fay leads a team of sealing experts with a passion for problem solving, expedited delivery, and a proven go-the-extra-mile attitude toward customer service. H&D thrives on providing unique solutions, the right products, and speedy service to industries where productivity is key.